Hunan Institute of Advanced Sensing and Information Technology Publishes Important Research Progress in Carbon-based Integrated Circuits on Science

Academician Peng Lianmao and Professor Zhang Zhiyong led the research team to develop a new purification and self-assembly method, using multiple polymer dispersion and purification techniques to obtain ultra-high-purity carbon tube solution. Combined with the dimension-limiting self-alignment method, they prepared a carbon tube array with a density of 120 / μm, a semiconductor purity of 99.99995%, and a diameter distribution of 1.45 ± 0.23 nm on a 4-inch substrate. This met the needs of ultra-large-scale carbon tube integrated circuits and solved key bottleneck of the constraints on the actual performance of carbon tube transistors and integrated circuits. On this basis, field effect transistors and ring oscillator circuits were prepared in batches. The peak transconductance and saturation current of 100nm gate-length carbon tube transistors reached 0.9 mS / μm and 1.3 mA / μm (VDD = 1V), respectively. The subthreshold swing at room temperature reached amplitude of 90 mV / DEC. The batch production of fifth-order ring oscillator circuits reached a yield rate of more than 50%, with a maximum oscillation frequency of 8.06 GHz, far exceeding the disclosed nano-material-based circuits, and its performance surpassed the transistors of the same gate length silicon-based CMOS technology and circuits, showing the great advantages of carbon tube electronics.